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ANEST IWATA
Vacuum Pump
ISP dry vacuum pump
ANEST IWATA Dry Vacuum Pumps ANEST IWATA ISP Series (Scroll Meister).
Best-selling dry pumps.
These low-vibration, low-noise pumps are oil free and used in many fields.

Anest iwata ISP dry vacuum pump
ISP-50/90/250C/500C/1000

【NEW】Leak-tight pumps with improved leak tightness launched!
・Clean exhaust and vacuum
・Easy to use with low vibration and low noise
・Compliant with CE and CSA
・Compliant with RoHS Directive

【NEW】 New leak-tight ISP-500C model launched!
We now offer leak-tight pumps in the 500L class that provide greater leak tightness than the former models to meet the needs of those customers wishing to recover rare gases or environmentally hazardous gases efficiently or conduct highly accurate analyse

【Main applications】
■Gas recovery
■Analyzer
■Others

Features
Extensive product lineup
Five models are available, from ISP-50 to ISP-1000.
The pumps can deal with a wide range of applications from atmospheric pressure to the ultimate pressure.
These are multi-voltage pumps that can be used with any type of power supply around the world (except ISP-50).

Track record proving ANEST IWATA's supremacy
The dry scroll vacuum pumps are used in various vacuum environments, ranging from the accelerator market to the general-purpose vacuum device market.
These pumps provide clean vacuum without back-diffusion of lubricating oil.
They endure repeated continuous operation between atmospheric pressure and vacuum and are capable of continuous operation near atmospheric pressure.
These features make the pumps best-selling models.

Features of scroll-type pumps - low vibration, low noise and high efficiency!
The processes of suction, compression and exhaust proceed continuously with little change in torque, resulting in low vibration and low noise.
The suction chamber and exhaust chamber are not adjacent to each other, making the pumps less prone to leaks and highly efficient.

Ease of maintenance
Since the pumps do not use cooling water or lubricating oil, they are easy to install and maintain.
There is no need to inspect and replace oil filters, lubricating oil, etc.

Applications
■Sputtering equipment, vacuum deposition equipment, ion plating equipment
■Surface modification, electron beam process
■Gas circulation and recovery devices
■Vacuum Pump system
■He leak detector
■Vacuum vacuum chuck
■Accelerator
■Vacuum furnace, vacuum heat treatment furnace
■Laboratory experiments and analyzers
■Vacuum packaging machine
■Others

Safety precautions
This vacuum pumping system is suitable for clean processes only
Do not use toxic, explosive, flammable or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used special gases or other hazardous substances.
Use at ambient temperature in the range of 5℃ to 40℃(10℃ to 40℃ for ISP-1000).

Model ISP-50 ISP-90 ISP-250C ISP-500C ISP-1000
Displacement L/min
     (50/60Hz)
50/60 90/108 250/300 500/600 1000/1200
Ultimate
pressure
Pa(50/60Hz) 20/15 5 1.6 1 1
Torr(50/60Hz) 1.5×10-1 / 1.1×10-1 3.7×10-2 1.2×10-2 7.5×10-3  
mbar(50/60Hz) 2×10-1 / 1.5×10-1 5×10-2 1.6×10-2 1×10-2  
Motor power kW 0.1 0.15 0.4 0.6 1.4
Voltage 1-phase 100, 115 / 200, 230 --
3-phase -- -- 200, 208, 230 / 380, 400,   415, 460
Noise level dB(A) 48(air flush 57) 52(air flush 57) 58(air flush 66) 60(air flush 68) 67(air flush 74)
Weight 1-phase 12 14 25 44 --
3-phase -- -- 23 38 56
Leak tightness Pa・m3/s ≦1.0×10-7 ≦1.0×10-5
Water vapor g/day 3(air flush) 5(air flush) 25(air flush)
Air flush L/min 4 9 10
Dimensions 1-phase L317×W155×H227 L308×W214×H225 L400×W252×H336 L443×W328×H372
(L443×W290×H397)
--
3-phase -- -- L370×W252×H336 L372×W328×H372
(L372×W290×H397)
L504×W390×H421
(L504×W358×H451)
Inlet  connection NW 25 40
Outlet connection NW 16 25 40
Cooling systerm 空冷
Ambient  temperature 5~40 10~40
Stardard equipment Air flush, timer, thermal protector(1-phase) Air flush, timer, thermal protector(1-phase) Air flush, timer